Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Batch fabricated semiconductor micro-switch
Batch fabricated semiconductor thin-film pressure sensor and...
Bulk fabricated electromagnetic micro-relays/micro-switches and
Bulk micromachined inductive transducers on silicon
Micromachined acceleration activated mechanical switch and...
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Profile ID: LFUS-PAI-P-523957