Corporate Assignee
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Corporate Assignee
active
No affiliations
Batch fabricated semiconductor micro-switch
Batch fabricated semiconductor thin-film pressure sensor and...
Latching mechanism for optical switches
Micromachined acceleration activated mechanical switch and...
Micromachined voltage controlled optical attenuator
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