Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2005-04-05
2005-04-05
Cuneo, Kamand (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S758010
Reexamination Certificate
active
06876191
ABSTRACT:
An apparatus for treating wafers, provided with at least one treatment chamber, the apparatus being provided with a feeding section in which wafers contained in a wafer storage box can be fed into the apparatus, the apparatus being provided with a wafer handling apparatus, by means of which wafers can be taken out of the wafer storage boxes so as to be treated in the treatment chamber, and the apparatus being provided with at least one sensor box arranged such that the wafer handling apparatus can feed a wafer into the sensor box through an opening provided for that purpose in the at least one sensor box, and the at least one sensor box being arranged to carry out measurements at a wafer, wherein the at least one sensor box is movably arranged and the apparatus is provided with a sensor box handling apparatus arranged to move the at least one sensor box from a storage position to a measuring position.
REFERENCES:
patent: 5407449 (1995-04-01), Zinger
patent: 5719495 (1998-02-01), Moslehi
patent: 5981399 (1999-11-01), Kawamura et al.
patent: 6420864 (2002-07-01), Abraham et al.
patent: 6632068 (2003-10-01), Zinger et al.
patent: 0 827 194 (1998-03-01), None
“Analyses of a 200/300 mm vertical furnace with integrated metrology”, T. Claasen-Vujcic et al.,Solid State Technology, Apr. 2001.
Patent Abstracts of Japan (European Patent Office), Publication No. 2001284444, Publication Date: Oct. 12, 2001; Application Date: Mar. 30, 2000; Application No. 2000094285. Applicant: Sony Corp.; Inventor: Matsusako Yuji; Title: Wafer Cassette Test Device. (1 sheet) Abstract only.
de Ridder Christianus Gerardus M.
Hasper Albert
Snijders Gert-Jan
Zinger Jan
ASM International N.V.
Cuneo Kamand
Patel Paresh
Weingarten Schurgin, Gagnebin & Lebovici LLP
LandOfFree
Apparatus for treating wafers, provided with a sensor box does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for treating wafers, provided with a sensor box, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for treating wafers, provided with a sensor box will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3395943