4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Removable furnace bottom section or kiln cart

Albert Hasper

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Apparatus for treating wafers, provided with a sensor box

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Chemical vapor deposition of TiN films in a batch reactor

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Deposition of TiN films in a batch reactor

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
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Device for processing semiconductor wafers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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In situ silicon and titanium nitride deposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-506869

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