4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Christianus Gerardus M. de Ridder

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Apparatus for processing a wafer

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate

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Apparatus for treating a wafer

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for treating wafers, provided with a sensor box

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2622785

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