4. Material or article handling
  5. Chamber of a type utilized for a heating function and...
  6. Charging of chamber

Gert-Jan Snijders

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Apparatus for treating a wafer

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for treating wafers, provided with a sensor box

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Chemical vapor deposition of TiN films in a batch reactor

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition of TiN films in a batch reactor

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Gas supply system, valve assembly and method of forming...

Fluid handling – Systems – Multiple inlet with multiple outlet
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Profile ID: LFUS-PAI-P-1812690

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