Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Reexamination Certificate
2011-08-09
2011-08-09
Jones, Stephen E (Department: 2817)
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
C333S032000, C333S0990PL
Reexamination Certificate
active
07994872
ABSTRACT:
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
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patent: 5936481 (1999-08-01), Fujii
patent: 6259334 (2001-07-01), Howald
patent: 2003/0054647 (2003-03-01), Suemasa et al.
patent: 2005/0133163 (2005-06-01), Shannon et al.
patent: 2005142150 (2005-06-01), None
patent: 2006345001 (2006-12-01), None
PCT Search Report and Written Opinion dated Mar. 22, 2010 (PCT/US2009/051240).
Cruse James P.
Miller Matthew L.
Ramaswamy Kartik
Shannon Steven C.
Yang Jang Gyoo
Applied Materials Inc.
Jones Stephen E
Patterson & Sheridan L.L.P.
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