4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jang Gyoo Yang

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Apparatus for multiple frequency power application

Wave transmission lines and networks – Automatically controlled systems – Impedance matching
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Capacitively coupled plasma reactor with magnetic plasma...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Capacitively coupled plasma reactor with magnetic plasma...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Capacitively coupled plasma reactor with uniform radial...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Dual bias frequency plasma reactor with feedback control of...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-2201980

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