Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1991-12-13
1993-01-05
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
356382, 356384, 356385, 356239, 250560, G01B 1106, G01N 2186
Patent
active
051775646
ABSTRACT:
An apparatus for measuring the thickness of a plate-shaped article with a substantially rectangular lateral face, comprises a measuring optical system including a light-emitting unit for emitting a measuring light beam along an optical axis in a predetermined plane, and a light-receiving unit provided on said optical axis and adapted to generate an output signal corresponding to the amount of detected measuring light, support system for supporting the article in such a manner that the article is substantially parallel to the predetermined plane and the measuring light enters obliquely the lateral face of the article, relative movement unit for moving, in a direction crossing said predetermined plane, either of said article and the measuring light relative to the other, and determination unit for determining the thickness of the article, based on the output signal of the measuring optical system and the amount of movement by the relative movement unit.
REFERENCES:
patent: 3743428 (1973-07-01), Brown
patent: 4007992 (1977-02-01), Petrohilos et al.
patent: 4634281 (1987-01-01), Eikmeyer
Kato Kinya
Takaoka Kazuhiro
Nikon Corporation
Pham Hoa Q.
Rosenberger Richard A.
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