Electric heating – Heating devices – With heater-unit housing – casing – or support means
Patent
1997-02-12
1999-11-30
Walberg, Teresa
Electric heating
Heating devices
With heater-unit housing, casing, or support means
219520, 118724, 118725, 118722, H05B 306, C23C 1600
Patent
active
059946784
ABSTRACT:
The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for bottom powered RF capability allows PECVD deposition at a temperature of at least 400.degree. C. for more efficient plasma treatment. A thermal choke isolates the heater from its support shaft, reducing the thermal gradient across the heater to reduce the risk of breakage and improving temperature uniformity of the heater. A deposition system incorporates a flow restrictor ring and other features that allow a 15 liters/minute flow rate through the chamber with minimal backside deposition and minimized deposition on the bottom of the chamber, thereby reducing the frequency of chamber cleanings, and reducing clean time and seasoning. Deposition and clean processes are also further embodiments of the present invention.
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Dornfest Charles
Juco Eller
Luo Lee
Sajoto Talex
Selyutin Leonid
Applied Materials Inc.
Robinson Daniel L.
Walberg Teresa
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