4. Coating apparatus
  5. Gas or vapor deposition

Leonid Selyutin

Inventor

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Apparatus for ceramic pedestal and metal shaft assembly

Electric heating – Heating devices – With heater-unit housing – casing – or support means
Patent

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Gas manifold

Coating apparatus – Gas or vapor deposition
Patent

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Heater for use in substrate processing apparatus to deposit...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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High temperature ceramic heater assembly with RF capability and

Electric heating – Metal heating – By arc
Patent

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High temperature multi-layered alloy heater assembly and related

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Profile ID: LFUS-PAI-P-446192

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