4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Lee Luo

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Apparatus for ceramic pedestal and metal shaft assembly

Electric heating – Heating devices – With heater-unit housing – casing – or support means
Patent

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Apparatus for substrate processing with improved throughput and

Coating apparatus – Gas or vapor deposition
Patent

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Chemical vapor deposition vaporizer

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Cyclical deposition of tungsten nitride for metal oxide gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Cyclical deposition of tungsten nitride for metal oxide gate...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-328198

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