Apparatus and method for rapid thermal control of a...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means

Reexamination Certificate

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C134S902000

Reexamination Certificate

active

06997197

ABSTRACT:
A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.

REFERENCES:
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5261965 (1993-11-01), Moslehi
patent: 5494526 (1996-02-01), Paranjpe
patent: 5522412 (1996-06-01), Ohba et al.
patent: 6554507 (2003-04-01), Namatsu
patent: 6596123 (2003-07-01), Kwan et al.

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