Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate
2006-02-14
2006-02-14
Barr, Michael (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With heating, cooling or heat exchange means
C134S902000
Reexamination Certificate
active
06997197
ABSTRACT:
A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.
REFERENCES:
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5261965 (1993-11-01), Moslehi
patent: 5494526 (1996-02-01), Paranjpe
patent: 5522412 (1996-06-01), Ohba et al.
patent: 6554507 (2003-04-01), Namatsu
patent: 6596123 (2003-07-01), Kwan et al.
Cotte John M.
Goldfarb Dario L.
McCullough Kenneth J.
Moreau Wayne M.
Pope Keith R.
Barr Michael
Chaudhry Saeed T
International Business Machines - Corporation
Morris Daniel P.
Perman & Green LLP
LandOfFree
Apparatus and method for rapid thermal control of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for rapid thermal control of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for rapid thermal control of a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3689978