4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Keith R. Pope

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Apparatus and method for rapid thermal control of a...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate

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Apparatus for cleaning filters

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate

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Elimination of photo-induced electrochemical dissolution in chem

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Elimination of photo-induced electrochemical dissolution in...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Etching of silicon nitride

Compositions – Etching or brightening compositions – Inorganic acid containing
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Profile ID: LFUS-PAI-P-207333

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