4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Kenneth J. McCullough

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Apparatus and method for increasing throughput in fluid...

Fluid handling – Systems – With pump
Reexamination Certificate

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Apparatus and method for rapid thermal control of a...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate

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Apparatus and method for wet cleaning

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Apparatus and process for supercritical carbon dioxide phase...

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Reexamination Certificate

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Apparatus and process for supercritical carbon dioxide phase...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
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Profile ID: LFUS-PAI-P-207331

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