4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Gilbert Hausmann

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Apparatus and method for actively controlling surface...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Apparatus and method for ex-situ testing of performance paramete

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Apparatus for retaining a subtrate in a semiconductor wafer proc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Cathode assembly containing an electrostatic chuck for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Chemical vapor deposition of barriers from novel precursors

Coating processes – Coating by vapor – gas – or smoke – Metal coating
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Profile ID: LFUS-PAI-P-200518

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