Material or article handling – Article reorienting device
Reexamination Certificate
2011-04-12
2011-04-12
Adams, Gregory W (Department: 3652)
Material or article handling
Article reorienting device
C414S780000, C414S936000, C901S048000, C269S058000, C269S2540DF
Reexamination Certificate
active
07922440
ABSTRACT:
The present invention comprises an apparatus and method for centering a substrate in a process chamber. In one embodiment, the apparatus comprises a substrate support having a support surface adapted to receive the placement of a substrate and a reference axis substantially perpendicular to the support surface, and a plurality of centering members extending above the support surface. Each centering member is biased into a first position and is movable to a second position by interacting with an opposing member. A movement between the first position and the second position thereby causes each centering member to releasably engage with a peripheral edge of the substrate to push the substrate in a direction toward the reference axis.
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International Search Report and Written Opinion dated Oct. 9, 2008 for International Application No. PCT/US2008/069545.
Balasubramanian Ganesh
Chan Chiu
Du Bois Dale R.
Fodor Mark A.
Janakiraman Karthik
Adams Gregory W
Applied Materials Inc.
Patterson & Sheridan LLP
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