4. Material or article handling
  5. Article reorienting device

Chiu Chan

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Apparatus and method for centering a substrate in a process...

Material or article handling – Article reorienting device
Reexamination Certificate

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Method for depositing an amorphous carbon film with improved...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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System and method for chemical mechanical planarization

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Tungsten CMP with improved alignment mark integrity, reduced...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2255904

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