4. Material or article handling
  5. Article reorienting device

Ganesh Balasubramanian

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Apparatus and method for centering a substrate in a process...

Material or article handling – Article reorienting device
Reexamination Certificate

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Blocker plate bypass to distribute gases in a chemical vapor...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Interface engineering to improve adhesion between low k stacks

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for depositing an amorphous carbon film with improved...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Method to deposit functionally graded dielectric films via...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2255903

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