Radiant energy – Inspection of solids or liquids by charged particles
Patent
1980-09-12
1982-08-10
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250423F, G01N 2300
Patent
active
043439934
ABSTRACT:
The vacuum tunnel effect is utilized to form a scanning tunneling microscope. In an ultra-high vacuum at cryogenic temperature, a fine tip is raster scanned across the surface of a conducting sample at a distance of a few Angstroms. The vertical separation between the tip and sample surface is automatically controlled so as to maintain constant a measured variable which is proportional to the tunnel resistance, such as tunneling current. The position of the tip with respect to the surface is controlled preferably by piezo electric drive means acting in three coordinate directions. The spatial coordinates of the scanning tip are graphically displayed. This is conveniently done by displaying the drive currents or voltages of piezo electric drives.
REFERENCES:
"The Topografiner: An Instrument for Measuring Surface Microtopography", Young et al., Review of Sci. Ins., vol. 43, No. 7, Jul. 1972, pp. 999-1011.
"Field-Emission Microscopy from Glass-coated Tips", Rihon, Phys. Stat. Sol(a), vol. 54, No. 1, Jul. 1979, pp. 189-194.
"Field Emission Ultramicrometer", Young, Rev. of Sci. Ins., vol. 37, No. 3, Mar. 1966, pp. 275-278.
"Vacuum--Tunneling Spectroscopy," Plummer et al., Physics Today, vol. 28, No. 4, Apr. 1975, pp. 63-71.
Binnig Gerd
Rohrer Heinrich
Anderson Bruce C.
Drumheller Ronald L.
International Business Machines - Corporation
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