Advanced via inspection tool (AVIT)

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage

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356237, 382 8, G01N 2188

Patent

active

052164853

ABSTRACT:
A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A Laser light is polarized into at least one orientation and then reflected off of a rotated polygon mirror. This causes the light to "move" over the area of interest. A plurality of fiber optic bundles are used to receive and conduct the reflected light back to photomultipliers. The photomultiplers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

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T. Ninomiya, et al., "Automatic 21/2D Shape Inspection System for Via-Hole Fillings of Green Sheets by Shadow Image Analysis" IEEE pp. 515-520, 1989.
IBM Docket No. FI9-91-123 U.S. PTO Application Ser. No. 07/754,830 filed Sep. 4, 1991 entitled "Printing Apparatus".
IBM Docket No. FI9-91-160 U.S. PTO Application Ser. No. 07/754,793 filed Sep. 4, 1992 entitled "Method and Apparatus for Object Inspection".

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