4. Thermal measuring and testing
  5. Temperature measurement
  6. In spaced noncontact relationship to specimen

Matthew Fenton Davis

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Advanced process sensing and control using near infrared...

Optical waveguides – Optical waveguide sensor
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Determining endpoint in a substrate process

Optics: measuring and testing – By light interference – For dimensional measurement
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Energy dissipating coupling

Rotary kinetic fluid motors or pumps – Including destructible – fusible – or deformable non-reusable...
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Integrated method for removal of halogen residues from...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method and apparatus for removing a halogen-containing residue

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2209982

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