4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means
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Kasahara Izumi

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Kataoka Toyotaka

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Kawamura Kazumitu

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Kawauchi Yasunobu

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Kelcz Frederick

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Kern Dieter P.

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Klusendorf John I.

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Kondor Tibor

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Konishi Fumiya

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Konle Robert L.

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Kuehn Rainhard

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Kuehnel Werner

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Kusao Kenji

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Kuschel Georg

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Lakerveld Herman Gerard

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Laughinghouse Charles Leo

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Leguen Jacques

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Leica Microsystems Lithography Limited

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Lowndes Douglas

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Luce John S.

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