4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Fumiya Konishi

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Ion-beam etching method and an apparatus therefor

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Process and apparatus for making fine-scale patterns

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Process for analyzing charged particles

Radiant energy – Ionic separation or analysis – Methods
Patent

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Profile ID: LFUS-PAI-P-555015

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