4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Leica Microsystems Lithography Limited

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Electron beam aperture element

Radiant energy – Radiation controlling means
Reexamination Certificate

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Electron beam pattern-writing column

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Method of and machine for pattern writing by an electron beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method of writing a pattern by an electron beam

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent

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