4. Etching a substrate: processes
  5. Etching and coating occur in the same processing chamber

International Business Machines Corporation Inc.

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Back end of the line structures with liner and noble metal...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
Reexamination Certificate

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Back end of the line structures with liner and noble metal...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
Reexamination Certificate

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Plasma CVD apparatus and processes

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Patent

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