4. Etching a substrate: processes
  5. Etching and coating occur in the same processing chamber

David S. L. Mui

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Apparatus for particle removal by single-phase and two-phase...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
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Method and system for realtime CD microloading control

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method for fabricating a gate structure of a field effect...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Methodology for repeatable post etch CD in a production tool

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Monitoring substrate processing by detecting reflectively...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Profile ID: LFUS-PAI-P-1767557

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