4. Superconductor technology: apparatus, material, process
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Method for epitaxial lift-off for oxide films utilizing supercon

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – With material removal by etching – laser ablation – or...
Patent

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Method for manufacturing superconducting thin film formed of oxi

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – With material removal by etching – laser ablation – or...
Patent

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Micro-fabrication method and equipment thereby

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – With material removal by etching – laser ablation – or...
Reexamination Certificate

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