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Superconducting multilayer interconnection formed of oxide super

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – With material removal by etching – laser ablation – or...
Patent

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Surface planarization of high temperature superconductors

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – With material removal by etching – laser ablation – or...
Reexamination Certificate

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