4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Plural fluid growth steps with intervening diverse operation
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Gallium nitride high electron mobility transistor structure

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation
Reexamination Certificate

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Growth of GaN on a substrate using a ZnO buffer layer

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation
Patent

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