4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. On insulating substrate or layer
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Ultimate SIMOX

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Ultra shallow junction formation by epitaxial interface...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Ultra-thin, high quality strained silicon-on-insulator...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Use of hydrogen implantation to improve material properties...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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