Integrated rough/purge/vent (RPV) valve

Refrigeration – Low pressure cold trap process and apparatus

Reexamination Certificate

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Reexamination Certificate

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10804842

ABSTRACT:
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.

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patent: WO 97/39242 (1997-10-01), None

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