Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate
2007-03-27
2007-03-27
Doerrler, William C. (Department: 3744)
Refrigeration
Low pressure cold trap process and apparatus
Reexamination Certificate
active
10804842
ABSTRACT:
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.
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Ash Gary S.
Bartlett Allen J.
Stira Mark A.
Thompson Brian
Brooks Automation Inc.
Doerrler William C.
Hamilton Brook Smith & Reynolds P.C.
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