Integration of automated cryopump safety purge

Details Integration of automated cryopump safety purge Integration of automated cryopump safety purge

2005-05-23

2008-08-26

Doerrler, William C (Department: 3744)

Refrigeration

Low pressure cold trap process and apparatus

Reexamination Certificate

active

07415831

ABSTRACT:
A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

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