Variable curvilinear axis deflection means for particle optical

Details Variable curvilinear axis deflection means for particle optical Variable curvilinear axis deflection means for particle optical

1996-07-23

1997-06-03

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

25049223, H01J 37147

Patent

active

056357192

ABSTRACT:
An improved particle lens has an axis which is shifted to follow the central ray as it is deflected through the lens creating, in effect, a variable curvilinear optical axis for the lens. The variable curvilinear optical axis is created for the lens so that the axis varies proportionally to the magnitude of the beam deflection. The optical axis of the lens is shifted by applying a uniform field to the lens to cancel the first term of the radial field with a function that is dependent on the position along the z-axis. This function is the trajectory of the central ray of the electron beam.

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