4. Radiant energy
  5. Ion generation
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Lithographic apparatus and device manufacturing method

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Low ripple regulated X-ray tube power supply filament transforme

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Low temperature ion source for calutrons

Radiant energy – Ion generation – Arc type
Patent

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Low-voltage source for narrow electron/ion beams

Radiant energy – Ion generation – Field ionization type
Patent

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