Apparatus for producing ions of thermally labile or nonvolatile
Apparatus operating with contact ionization for the production o
Arc chamber filament for ion implanter
Arc chamber for an ion implantation system
Arc chamber for ion implanter
Arc initiation in cathodic arc plasma sources
Atomic jet radiation source
Atomic level ion source and method of manufacture and operation
Atomically sharp iridium tip
Automatic cleaning of ion sources
Axially compact field emission cathode assembly