4. Radiant energy
  5. Ion generation
  6. With sample vaporizing means
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Ion implant using tetrafluoroborate

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Ion source

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Ion source for an ion implanter

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Ion source vaporizer

Radiant energy – Ion generation – With sample vaporizing means
Reexamination Certificate

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Ion source, method of operating the same, and ion source system

Radiant energy – Ion generation – With sample vaporizing means
Reexamination Certificate

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Ionic current regulating device

Radiant energy – Ion generation – With sample vaporizing means
Patent

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Ionization source for mass spectrometry analysis

Radiant energy – Ion generation – With sample vaporizing means
Reexamination Certificate

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Ionization source for mass spectrometry analysis

Radiant energy – Ion generation – With sample vaporizing means
Reexamination Certificate

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Ionizing radiation generator

Radiant energy – Ion generation – With sample vaporizing means
Patent

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