Ion source, method of operating the same, and ion source system

Details Ion source, method of operating the same, and ion source system Ion source, method of operating the same, and ion source system

2005-01-18

2005-01-18

Vo, Tuyet Thi (Department: 2821)

Radiant energy

Ion generation

With sample vaporizing means

C250S289000, C250S42300F, C315S111810

Reexamination Certificate

active

06844556

ABSTRACT:
In an ion source, within a support body which supports a plasma production chamber for producing a plasma on the basis of an ion source flange, a cavity is provided ranging from a position near the plasma production chamber to a position near the ion source flange. The cavity serves as a cooling medium passage which introduces a cooling medium to a position near the plasma production chamber to cool the plasma production chamber. The plasma production chamber is cooled at a position very near it by the cooling medium. Therefore, temperature of the plasma production chamber at the time of plasma production is kept at low temperatures.

REFERENCES:
patent: 6288403 (2001-09-01), Horsky et al.
patent: 6452338 (2002-09-01), Horsky
patent: 20030085663 (2003-05-01), Horsky
patent: 01-98469 (1989-06-01), None
patent: 2000-243308 (2000-09-01), None
patent: 2001-135253 (2001-05-01), None
patent: WO 0143157 (2001-06-01), None

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