Ion source for an ion implanter

Details Ion source for an ion implanter Ion source for an ion implanter

1986-04-10

1988-01-12

Anderson, Bruce C.

Radiant energy

Ion generation

With sample vaporizing means

250423R, H01J 2700

Patent

active

047193557

ABSTRACT:
An ion source of a type used on ion implanters which includes a crucible having a hollow interior and a hole for providing fluid communication between the interior of and exterior to the crucible. A heater assembly is used for adjustably heating the crucible. The crucible hole is if fluid communication with a passageway down the crucible and with a vapor nozzle aperture. An arc chamber has an inlet positioned at the output of the vapor nozzle aperture. The material to be vaporized does not bond to the crucible interior when solidified from a liquid state.

REFERENCES:
patent: 2824967 (1958-02-01), Kamen
patent: 3654457 (1972-04-01), Yano et al.
patent: 3700892 (1972-10-01), Bell, Jr. et al.
patent: 3789253 (1974-01-01), Kervizic et al.
patent: 4112137 (1978-09-01), Zega

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