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Endcap for indirectly heated cathode of ion source

Radiant energy – Ion generation – Field ionization type
Patent

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Erosion resistant nozzles for laser plasma extreme ultraviolet (

Radiant energy – Ion generation – Field ionization type
Patent

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Extraction and deceleration of low energy beam with low beam...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Extraction electrode manipulator

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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