Erosion resistant nozzles for laser plasma extreme ultraviolet (

Details Erosion resistant nozzles for laser plasma extreme ultraviolet ( Erosion resistant nozzles for laser plasma extreme ultraviolet (

1998-02-27

2000-01-04

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

2504931, 378119, H01J 2700, G01G 400

Patent

active

060112670

ABSTRACT:
A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasma sources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10.sup.7 Xe plasma pulses.

REFERENCES:
patent: 4383171 (1983-05-01), Sinha et al.
patent: 4644576 (1987-02-01), Kuyel
patent: 4894511 (1990-01-01), Caledonia et al.
patent: 4940893 (1990-07-01), Lo
patent: 5577092 (1996-11-01), Kubiak et al.
patent: 5680429 (1997-10-01), Hirose et al.

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