Extraction electrode manipulator

Details Extraction electrode manipulator Extraction electrode manipulator

2008-09-25

2010-11-30

Nguyen, Kiet T (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S492210

Reexamination Certificate

active

07842931

ABSTRACT:
An extraction electrode manipulator system, comprising an ion source, a suppression electrode and a ground electrode, wherein the two electrode are supported by coaxially arranged two water cooled support tubes. A high voltage insulator ring is located on the other end of the coaxial support tube system to act as a mechanical support of the inner tube and also as a high voltage vacuum feedthrough to prevent sputtering and coating of the insulating surface.

REFERENCES:
patent: 4883968 (1989-11-01), Hipple et al.
patent: 5583344 (1996-12-01), Mizumura et al.
patent: 5920076 (1999-07-01), Burgin et al.
patent: 6501078 (2002-12-01), Ryding et al.

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