4. Pumps
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  6. Motor within rotary pumping member
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Turbo molecular pump

Pumps – Motor driven – Motor within rotary pumping member
Reexamination Certificate

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Turbo-molecular pump

Pumps – Motor driven – Motor within rotary pumping member
Patent

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Turbomolecular pump

Pumps – Motor driven – Motor within rotary pumping member
Patent

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Turbomolecular vacuum pump having a gas bearing-supported rotor

Pumps – Motor driven – Motor within rotary pumping member
Patent

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Turbomolecular vacuum pump having a magnetic bearing-supported r

Pumps – Motor driven – Motor within rotary pumping member
Patent

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