Pumps – Motor driven – Motor within rotary pumping member
Patent
1983-11-18
1986-09-02
Croyle, Carlton R.
Pumps
Motor driven
Motor within rotary pumping member
417365, 417424, 415 90, 310 905, F04B 1700
Patent
active
046093320
ABSTRACT:
A turbo-molecular pump characterized in that three out of five degrees of freedom except the rotation around the rotational axis of a shaft are actively controlled constrainingly by a pair of magnetic radius direction bearings and a pair of magnetic axial bearings, a bell-shaped rotor provided to cover the whole of magnetic bearing and a shaft which is supported by a magnetic bearing passively constraining the remaining two degrees of freedom, and said rotor is rotated at high speed by an inner-rotor type of a driving motor provided between a radius direction bearing and axial bearing.
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Miki Masaharu
Urano Chiaki
Adams Bruce L.
Burns Robert E.
Croyle Carlton R.
Lobato Emmanuel J.
Seiko Seiki Kabushiki Kaisha
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