Turbomolecular vacuum pump having a magnetic bearing-supported r

Details Turbomolecular vacuum pump having a magnetic bearing-supported r Turbomolecular vacuum pump having a magnetic bearing-supported r

1974-09-26

1977-05-17

Croyle, Carlton R.

Pumps

Motor driven

Motor within rotary pumping member

417424, 417372, 415 90, F04B 3504, F03B 500

Patent

active

040239209

ABSTRACT:
A turbomolecular vacuum pump has a housing, a vertically oriented hollow pump rotor situated in the housing, and a vertically upwardly oriented stub shaft affixed to the housing and extending into the hollow pump rotor. The pump rotor is supported on the stub shaft by a magnetic axial bearing and at least one magnetic radial bearing, all disposed in the space surrounded by the hollow pump rotor.

REFERENCES:
patent: 2436939 (1948-03-01), Schug
patent: 2442019 (1948-05-01), Ray
patent: 2536824 (1951-01-01), Sontheim
patent: 2557879 (1951-06-01), Lewis et al.
patent: 2742223 (1956-04-01), Font
patent: 2772863 (1956-12-01), Harney et al.
patent: 2809526 (1957-10-01), Lundberg
patent: 3168977 (1965-02-01), Garnier et al.
patent: 3614181 (1971-10-01), Weeks
patent: 3628894 (1971-12-01), Ferguson et al.
patent: 3644067 (1972-02-01), Yowell
patent: 3650581 (1972-03-01), Boden et al.
patent: 3698775 (1972-10-01), Gilbert
patent: 3731984 (1973-05-01), Habermann
patent: 3749528 (1973-07-01), Rousseau et al.

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