Turbomolecular vacuum pump having a gas bearing-supported rotor

Details Turbomolecular vacuum pump having a gas bearing-supported rotor Turbomolecular vacuum pump having a gas bearing-supported rotor

1974-11-25

1976-07-13

Croyle, Carlton R.

Pumps

Motor driven

Motor within rotary pumping member

417420, 417424, 415 90, 415112, 308 9, F04B 3504, F04D 2920, F03B 500

Patent

active

039690423

ABSTRACT:
A turbomolecular vacuum pump has a stator, a rotor having a vertical axis of rotation and disposed in the stator; a drive motor for rotating the rotor; a downwardly open, axially extending chamber in the rotor; a vertically upwardly oriented, stationarily supported stub shaft projecting into the rotor chamber; and axial, as well as radial gas bearings disposed within the rotor chamber for generating gas cushions between the rotor and the stub shaft.

REFERENCES:
patent: 3168977 (1965-02-01), Garnier et al.
patent: 3545338 (1970-12-01), Lucien
patent: 3570191 (1971-03-01), Williams
patent: 3628894 (1971-12-01), Ferguson et al.
patent: 3639791 (1972-02-01), Jenkin
patent: 3832084 (1972-11-01), Maurice

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