Optical edge break gage

Optical metrology of single features

Optical metrology of single features

Optical probe for scanning the features of an object and...

Optical probe for scanning the features of an object and...

Optional 3D digitizer, system and method for digitizing an...

Optoelectronic system using spatiochromatic triangulation

Pattern projection measurement grating

Patterned substrate surface mapping

Position measuring arrangement

Position-sensing device for 3-D profilometers

Process and apparatus for determining surface information...

Process and device for measuring distances on strips of...

Profiling of a component having reduced sensitivity to...

Profiling of a component having reduced sensitivity to...

Profiling of a component having reduced sensitivity to...

Range finder and method

Refractive production of a concentrically fanned structured...

Scanning phase measuring method and system for an object at...

Scanning phase measuring method and system for an object at...