Optical metrology of single features

Details Optical metrology of single features Optical metrology of single features

2008-05-27

2008-05-27

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

C356S237200, C356S607000

Reexamination Certificate

active

07379192

ABSTRACT:
The profile of a single feature formed on a wafer can be determined by obtaining an optical signature of the single feature using a beam of light focused on the single feature. The obtained optical signature can then be compared to a set of simulated optical signatures, where each simulated optical signature corresponds to a hypothetical profile of the single feature and is modeled based on the hypothetical profile.

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Bischoff, Jorg et al, (Jul. 1997) “Single feature metrology by means of light scatter analysis”, SPIE vol. 3050 , pp. 574-585.
Jenkins et al.,Fundamentals of Optics, 3rd Edition, McGraw-Hill, New York, 1957, pp. 306-308.

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