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Method for measuring position, linear velocity and velocity...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Method for positioning a target portion of a substrate with...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Method for tracking the location of mobile agents using...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Method of adjusting the operating region of a tool component...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Method of adjusting the operating region of a tool component...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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METHOD OF AND APPARATUS FOR REAL-TIME CONTINUAL NANOMETER...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Moiré interferometer with overlapping illumination...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Moving body system and method of detecting position of...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Multiple laser optical systems and methods

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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