Method for positioning a target portion of a substrate with...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis

Reexamination Certificate

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C356S614000

Reexamination Certificate

active

07746484

ABSTRACT:
A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.

REFERENCES:
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 2004/0080737 (2004-04-01), Jasper et al.
patent: 2005/0134865 (2005-06-01), Schoonewelle et al.
patent: 2008/0079920 (2008-04-01), Hommen et al.

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