Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate
2007-05-23
2010-06-29
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Position or displacement
Position transverse to viewing axis
C356S614000
Reexamination Certificate
active
07746484
ABSTRACT:
A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.
REFERENCES:
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 2004/0080737 (2004-04-01), Jasper et al.
patent: 2005/0134865 (2005-06-01), Schoonewelle et al.
patent: 2008/0079920 (2008-04-01), Hommen et al.
Brinkhof Ralph
Minnaert Arthur Winfried Eduardus
Van De Vin Cornelis Henricus
Van Zon Alex
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Toatley Jr. Gregory J
Ton Tri T
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